Gas Measurement Solutions for Semiconductor Manufacturing
Semiconductor manufacturing depends on precise gas and liquid measurement to maintain purity, protect wafer yield, and optimise ultra-high purity processes. Our portfolio includes trace oxygen and moisture analyzers, gas purity analyzers, oxygen sensors, and liquid level switches designed for critical semiconductor applications.
Protecting Purity, Reliability, and Process Integrity
Semiconductor manufacturing requires strict control of process conditions and semiconductor gases. Trace concentrations of oxygen, moisture, or other impurities can affect wafer quality, equipment performance, and overall production efficiency.
Reliable gas analyzers and monitoring technologies help manufacturers detect contamination, protect process integrity, and maintain consistent output across demanding production environments.
Industry Challenge: Maintaining Ultra-High Purity
Semiconductor processes use a wide range of specialty chemicals and ultra-high purity gases. Even very small concentrations of contaminants can cause product defects, lower yields, and increase operating costs.
Common challenges include:
- Oxygen intrusion: Oxygen entering UHP gas systems can cause unwanted oxidation and contribute to wafer defects.
- Moisture contamination: Trace moisture can compromise sensitive etching, deposition, and lithography processes.
- Trace impurities: Hydrocarbons, sulfur compounds, ammonia, and other contaminants can affect wafer uniformity.
- Liquid level variation: Incorrect liquid levels can cause overfilling, dry running, or cross-contamination in chemical handling systems.
Addressing these risks requires measurement solutions that combine ppt and ppb-level sensitivity with fast response, long-term stability, and straightforward integration into complex semiconductor systems.
Advanced Gas and Liquid Monitoring Solutions
Analytical Industries Trace Oxygen Measurement Solutions
PI2-MS Ultra Trace Oxygen Analyzer
The PI2-MS provides reliable and cost-effective trace oxygen measurement down to low ppb concentrations. Its fast response, long-life replaceable sensors, and straightforward calibration support gas purity verification, tool monitoring, gloveboxes, and wafer processing.
Bench-mounted, wall-mounted, and portable configurations allow the analyzer to be adapted to different facility and process requirements.
GPR-1200 Portable Trace Oxygen Analyzer
The GPR-1200 combines portable operation with accurate oxygen measurement down to approximately 50 ppb. It is well suited to spot checks and pipeline verification in high-purity gas systems.
A 4-way bypass and sample valve supports fast response while helping extend sensor life. Additional capabilities include data logging and a configuration certified for hazardous areas.
GPR-1500GB Trace Oxygen Analyzer
Developed for gloveboxes, nitrogen generators, and other controlled environments, the GPR-1500GB and GPR-2500GB provide accurate oxygen measurement from approximately 21% O₂ in ambient air down to low ppm concentrations. Available ranges extend from 0–10 ppm to 0–25% O₂.
These analyzers support controlled-atmosphere applications involving semiconductor processes and UHP gases. Intrinsically safe variants with an IIC rating are also available for hazardous environments and hydrogen-rich gas systems.
Gas and Liquid Measurement Solutions from Other DwyerOmega Brands
Sensore Zirconia Oxygen Sensors
Sensore ZrO₂-based oxygen sensors support OEM integration and measurement at process-critical locations. They provide stable and responsive measurement from ppm to percentage oxygen levels.
Flanged, board-mounted, and threaded configurations offer flexible integration options wherever oxygen intrusion could affect process stability or production yield.
Michell Pura Trace Moisture Transmitter
The Michell Pura provides fast and accurate trace moisture measurement down to −120 °C dew point, equivalent to approximately 1 ppbV. Its compact and robust design incorporates VCR connections for integration into ultra-high purity gas lines.
Analog and digital outputs support process integration, while the service exchange programme simplifies maintenance and helps maintain stable process operation.
LDetek MultiDetek3 Modular Process Gas Chromatograph
The MultiDetek3 is a dual gas chromatograph designed for ppt and ppb-level impurity analysis in UHP gases. It can monitor noble gases, hydrocarbons, sulfur compounds, and ammonia, with optional integration of oxygen and moisture measurement modules.
Flexible detector configurations, a large touchscreen interface, and remote management software combine high-precision gas analysis with efficient operation.
SST Sensing Liquid Level Monitoring
SST Sensing liquid level switches use solid-state optical technology to detect the presence or absence of liquid accurately without moving parts.
Compact versions are available for restricted installation spaces, alongside robust industrial housings for demanding conditions and intrinsically safe models for hazardous areas. Fast response, resistance to foam and bubbles, multiple housing materials, and varied mounting configurations support reliable operation across chemical handling applications.
Applications and Industries
Our gas analyzers, transmitters, sensors, and liquid level switches support semiconductor manufacturing and other industries that depend on ultra-high purity gases.
Applications include:
- UHP and specialty gas production and distribution
- Wafer processing, etching, and deposition
- Gloveboxes and controlled environments
- Tool monitoring and purge gas verification
- Chemical delivery and wastewater systems
- Aerospace, specialty metal processing, and research applications requiring ultra-pure gases
Conclusion
Semiconductor manufacturing requires precise control of gas purity, contaminants, and liquid levels. Our portfolio of analyzers, transmitters, sensors, switches, and gas analysis systems supports accurate and reliable measurement across demanding production environments.
By combining advanced measurement performance with flexible integration and straightforward maintenance, these solutions help semiconductor manufacturers protect process integrity, improve efficiency, reduce contamination risks, and support higher production yields.
Contact us to discuss how our gas and liquid measurement solutions can support your semiconductor manufacturing processes.
